A. Lashkov, N. Yakunina, A. Romashkin, N. Struchkov, K. Tsarik
{"title":"基于石墨烯纳米带和聚苯胺纳米通道的传感器,通过离子蚀刻形成石墨烯-氧化石墨烯接触","authors":"A. Lashkov, N. Yakunina, A. Romashkin, N. Struchkov, K. Tsarik","doi":"10.1117/12.2624365","DOIUrl":null,"url":null,"abstract":"One of the ways to create highly sensitive gas sensors based on graphene is to modify graphene by forming nanometer-sized channels in it. In this work, ion beam etching was used for these purposes. The necessary doses of Ga+ focused ion beam (FIB) were found to etch graphene. Several different structures based on modified graphene have been manufactured and investigated. A method for manufacturing graphene structures with a width of less than 10 nm by Ga+ FIB has been found. Also, high conductivity for structures of nanogap with polyaniline (PANi) was found, which can be used as selective gas sensing structures. The paper presents the responses of structures with nano-channel of PANi between modified graphene electrodes to different concentrations of ammonia and water.","PeriodicalId":388511,"journal":{"name":"International Conference on Micro- and Nano-Electronics","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Sensors based on graphene nanoribbons and polyaniline nanochannels with graphene-graphene oxide contacts formed by ion etching\",\"authors\":\"A. Lashkov, N. Yakunina, A. Romashkin, N. Struchkov, K. Tsarik\",\"doi\":\"10.1117/12.2624365\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"One of the ways to create highly sensitive gas sensors based on graphene is to modify graphene by forming nanometer-sized channels in it. In this work, ion beam etching was used for these purposes. The necessary doses of Ga+ focused ion beam (FIB) were found to etch graphene. Several different structures based on modified graphene have been manufactured and investigated. A method for manufacturing graphene structures with a width of less than 10 nm by Ga+ FIB has been found. Also, high conductivity for structures of nanogap with polyaniline (PANi) was found, which can be used as selective gas sensing structures. The paper presents the responses of structures with nano-channel of PANi between modified graphene electrodes to different concentrations of ammonia and water.\",\"PeriodicalId\":388511,\"journal\":{\"name\":\"International Conference on Micro- and Nano-Electronics\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-01-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Micro- and Nano-Electronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2624365\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Micro- and Nano-Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2624365","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Sensors based on graphene nanoribbons and polyaniline nanochannels with graphene-graphene oxide contacts formed by ion etching
One of the ways to create highly sensitive gas sensors based on graphene is to modify graphene by forming nanometer-sized channels in it. In this work, ion beam etching was used for these purposes. The necessary doses of Ga+ focused ion beam (FIB) were found to etch graphene. Several different structures based on modified graphene have been manufactured and investigated. A method for manufacturing graphene structures with a width of less than 10 nm by Ga+ FIB has been found. Also, high conductivity for structures of nanogap with polyaniline (PANi) was found, which can be used as selective gas sensing structures. The paper presents the responses of structures with nano-channel of PANi between modified graphene electrodes to different concentrations of ammonia and water.