多层p/sup +/Si/(金属，半导体)热电堆红外探测器和热转换器的微机械实验结构优化

2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400) Pub Date : 2000-05-14 DOI:10.1109/ICMEL.2000.838761

D. Randjelović, Z. Djuric, R. Petrovic, Ž. Lazić, T. Dankovic

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引用次数: 1

摘要

本文介绍了p/sup +/Si/金属和p/sup +/Si/溅射Si热电堆测试结构的设计和制造技术，旨在优化多层热电堆红外探测器和热转换器的性能。利用微机械加工技术制作了一个实验结构。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Micromachined experimental structure for optimization of multilayer p/sup +/Si/(metal, semiconductor) thermopile IR detectors and thermal converters

This paper presents the design and fabrication technique of a test structure with p/sup +/Si/metal and p/sup +/Si/sputtered-Si thermopiles intended for optimization of performance of multilayer thermopile IR detectors and thermal converter. An experimental structure is fabricated using micromachining techniques.

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来源期刊

2000 22nd International Conference on Microelectronics. Proceedings (Cat. No.00TH8400)

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