高压、高温工况下封装层的TCAD建模

I. Imperiale, S. Reggiani, E. Gnani, A. Gnudi, G. Baccarani, L. Nguyen, M. Denison
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引用次数: 5

摘要

在高温下工作的高压集成电路中,由于电场从高压键垫/键合线向外扩散,电荷输运现象可能发生在封装层中。在这项工作中,高压封装行业中常用的环氧树脂的最相关特征已经在商业TCAD工具中建模和实现。虽然研究是在二维模拟域上进行的,但如果考虑到适当的边界条件,则可以获得与测量结果非常吻合的结果。TCAD的研究强调了金属化和电线在宽温度范围内的高压应力中所起的作用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
TCAD modeling of encapsulation layer in high-voltage, high-temperature operation regime
In high-voltage integrated circuits operating at high temperatures, charge transport phenomena can occur in the encapsulation layer as a consequence of the electric field spreading out from the high-voltage bondpads/bondwires. In this work, the most relevant features of epoxy resins commonly used in the high-voltage packaging industry have been modelled and implemented in a commercial TCAD tool. Although the study has been performed on a 2D simulation domain, it is shown that very good agreement with measurements can be obtained, provided that appropriate boundary conditions are taken into account. The TCAD investigation highlights the role played by metallization and wires during a high-voltage stress over a wide temperature range.
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