仪器制造中的射频等离子体发生器

Proceedings Third Russian-Korean International Symposium on Science and Technology. KORUS'99 (Cat. No.99EX362) Pub Date : 1999-06-22 DOI:10.1109/KORUS.1999.876260

V. M. Geller, V. Khrustalev, S.A. Chipurnov

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引用次数: 0

摘要

本文综述了大型反应堆射频/微波等离子体发生器结构的布局、结构和设计要点;给出了仪器维修所指出问题的回顾性估计。基本涵盖了电真空仪器制造的各个方面，并考虑到一些特殊的条件。

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RF plasma generators in instrument making

In this paper perspective layouts, regimes and design aspects of RF/microwave plasma generator constructions with large reactors are reviewed; retrospective estimations of instrumental maintenance of the indicated problems are given. The aspects of electrovacuum instrument making are covered basically, and a number of particular conditions are taken into account.

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Proceedings Third Russian-Korean International Symposium on Science and Technology. KORUS'99 (Cat. No.99EX362)

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