超薄栅极电介质递进击穿动力学的Toy模型

E. Miranda, D. Jiménez, J. Suñé
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引用次数: 0

摘要

提出了超薄栅极氧化物递进击穿动力学的简单解析模型。它显示了串联和并联电阻之间的相互作用,表示击穿路径及其周围环境导致与实验数据兼容的s型I-t特性。利用李雅普诺夫指数和与漏电流逻辑方程相关的势函数进行分析。讨论了初始电流值和系统吸引子在击穿轨迹中的作用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Toy model for the progressive breakdown dynamics of ultrathin gate dielectrics
A simple analytic model for the progressive breakdown (BD) dynamics of ultrathin) gate oxides is presented. It is shown how the interplay between series and parallel resistances that represent the breakdown path and its surroundings leads to a sigmoidal I-t characteristic compatible with experimental data. The analysis is carried out using the Lyapunov exponent and the potential function associated with the logistic equation for the leakage current. The roles played by the initial current value and the system's attractor in the breakdown trajectories are discussed.
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