用于痕量化学物质检测的高集成超灵敏硅盘微谐振器

J. Lu, T. Suga, Y. Zhang, T. Itoh, R. Maeda, T. Mihara
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引用次数: 0

摘要

研制了具有优良品质因子1319的高集成度硅盘微谐振器,用于空气中痕量化学物质的检测。在谐振腔上集成的压电PZT薄膜具有低驱动电压(~ 0.2V)、与集成电路良好的阻抗匹配和自驱动自传感能力。通过改进谐振腔的几何结构,成功地压缩了PZT电极堆的能量耗散和其他负面影响。该谐振器有望应用于人类医疗保健无线传感器网络。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Highly intergrated ultra-sensitive silicon disk micro resonator for trace amount of chemicals detection
Highly intergrated silicon disk mirco resonator with excellent quality factor, 1319 in air, was developed in this work for trace amount of chemicals detection. On resonator integrated piezoelectric PZT thin film enables low driving voltage (∼0.2V), good impedance matching with ICs and self actuation self sensing capability. The energy dissipation and other negative effects from PZT electrode stack were successfully compressed by refining the resonator's geometry. The proposed resonator is promising to wireless sensor network for human healthcare applications.
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