J. Lu, T. Suga, Y. Zhang, T. Itoh, R. Maeda, T. Mihara
{"title":"用于痕量化学物质检测的高集成超灵敏硅盘微谐振器","authors":"J. Lu, T. Suga, Y. Zhang, T. Itoh, R. Maeda, T. Mihara","doi":"10.1109/ICSENS.2009.5398170","DOIUrl":null,"url":null,"abstract":"Highly intergrated silicon disk mirco resonator with excellent quality factor, 1319 in air, was developed in this work for trace amount of chemicals detection. On resonator integrated piezoelectric PZT thin film enables low driving voltage (∼0.2V), good impedance matching with ICs and self actuation self sensing capability. The energy dissipation and other negative effects from PZT electrode stack were successfully compressed by refining the resonator's geometry. The proposed resonator is promising to wireless sensor network for human healthcare applications.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Highly intergrated ultra-sensitive silicon disk micro resonator for trace amount of chemicals detection\",\"authors\":\"J. Lu, T. Suga, Y. Zhang, T. Itoh, R. Maeda, T. Mihara\",\"doi\":\"10.1109/ICSENS.2009.5398170\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Highly intergrated silicon disk mirco resonator with excellent quality factor, 1319 in air, was developed in this work for trace amount of chemicals detection. On resonator integrated piezoelectric PZT thin film enables low driving voltage (∼0.2V), good impedance matching with ICs and self actuation self sensing capability. The energy dissipation and other negative effects from PZT electrode stack were successfully compressed by refining the resonator's geometry. The proposed resonator is promising to wireless sensor network for human healthcare applications.\",\"PeriodicalId\":262591,\"journal\":{\"name\":\"2009 IEEE Sensors\",\"volume\":\"21 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 IEEE Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2009.5398170\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2009.5398170","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Highly intergrated ultra-sensitive silicon disk micro resonator for trace amount of chemicals detection
Highly intergrated silicon disk mirco resonator with excellent quality factor, 1319 in air, was developed in this work for trace amount of chemicals detection. On resonator integrated piezoelectric PZT thin film enables low driving voltage (∼0.2V), good impedance matching with ICs and self actuation self sensing capability. The energy dissipation and other negative effects from PZT electrode stack were successfully compressed by refining the resonator's geometry. The proposed resonator is promising to wireless sensor network for human healthcare applications.