系统热膨胀系数(CTE)变化对锡晶须的影响

E. K. Snipes, G. Flowers, M. Bozack
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引用次数: 1

摘要

锡和生长衬底之间的热膨胀系数(CTE)的巨大变化为生长晶须提供了一种高度可靠和快速的方法。CTE效应可以通过晶须培养期间的热循环来增强,这能够逆转由于Sn中少量掺杂原子(例如Pb)而导致的晶须减少。CTE值接近Sn (0 < %ΔCTE < 25)的衬底有Al、Ag和黄铜;Sn的中间值(25 < %ΔCTE < 75)是Zn、Ni和Ta;与Sn (75 < %ΔCTE < 100)相比,半导体Si、GaAs和InP的价值更大。镀锡层厚度为0.5微米。热循环范围为- 40°C至125°C,斜坡2小时,静置4小时,每个循环共12小时。第二组比较样品在100°C±5°C进行等温退火。所有样品孵育37天(74个周期)后观察。与%ΔCTE < 75%的样品相比,%ΔCTE > 75%的样品的晶须密度(当循环时)显着更高。当使用半导体作为衬底时,似乎存在一个临界激活(或成核)阈值CTE错配,该错配“开启”了快速晶须生长。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Influence of systematic coefficient of thermal expansion (CTE) variations on Sn whiskering
Large variations in the coefficient of thermal expansion (CTE) between Sn and growth substrates provide a highly reliable and fast method to grow whiskers. The CTE effect can be enhanced by thermal cycling during whisker incubation, which is able to reverse reductions in whiskering due to small amounts of dopant atoms in the Sn (e.g., Pb). Investigated substrates with CTE close in value to Sn (0 < %ΔCTE < 25) were Al, Ag, and brass; intermediate in value to Sn (25 < %ΔCTE < 75) were Zn, Ni, and Ta; and far in value to Sn (75 < %ΔCTE < 100) were semiconductors Si, GaAs, and InP. A thickness of 0.5 micron of sputtered Sn was deposited on each coupon. The thermal cycling range was −40°C to 125°C, with 2 hour ramps and 4 hour dwells, for a total of 12 hours per cycle. A second, comparative set of specimens underwent isothermal annealing at 100°C ± 5°C. All samples were incubated for 37 days (74 cycles) before observation. Samples with a %ΔCTE > 75% resulted in drastically higher whisker densities (when cycled) compared with those with %ΔCTE < 75%. There appears to be a critical activation (or nucleation) threshold CTE mismatch which “turns on” fast whisker growth when using semiconductors as substrates.
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