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引用次数: 7
摘要
本文报道了一种表征亚阈值电流镜(SCM)中CMOS工艺波动的新方法。与已有的统计模型相比,所提出的模型在方法上简洁,计算复杂度低,但能很好地估计CMOS工艺在单片机电路上的波动,具有工程应用前景。该模型将依赖于集成电路过程的物理参数统计抽象为具有一定均值和标准差的随机变量,并将所有随机影响聚合为离散鞅。通过实验验证了该方法的正确性,该电路采用中芯0.18 μ m CMOS 1P6M混合信号处理,转换系数为100,输入范围为100pa ~ 1mua。该理论成功地预测了实验中测量到的~±10%的模间波动,并提出了单模上的阈值电压标准偏差~ 1 mV,符合铸造厂设计套件提出的工艺参数。计算概率与实测数据的偏差小于8%。同时,对高波动容限亚阈值模拟电路的设计提出了针对性的建议。
A Statistical Characterization of CMOS Process Fluctuations in Subthreshold Current Mirrors
A novel method to characterize CMOS process fluctuations in subthreshold current mirrors (SCM) is reported in this paper. The proposed model is succinct in methodology and calculation complexity comparing to the reported statistical models, however, provides favorable estimations of CMOS process fluctuations on the SCM circuit, which makes it being promising for engineering applications. The model statistically abstracts physical parameters, which depend on IC process, into random variables with certain mean values and standard deviations, while aggregating all the random impacts into a discrete martingale. The correctness of proposed method is experimentally verified by an SCM circuit implemented in SMIC 0.18 mum CMOS 1P6M mixed signal process with a conversion factor of 100 over an input range from 100 pA to 1 muA. The proposed theory successfully predicted the ~plusmn10% of die-to-die fluctuation measured in experiment, and also suggested the ~ 1 mV of threshold voltage standard deviation over a single die, which meets the process parameters suggested by the design kit from the foundry. The deviations between calculated probabilities and measured data are less than 8%. Meanwhile, pertinent suggestions to high fluctuation tolerance subthreshold analog circuits design are also made and discussed.