{"title":"丙烷气氛中钌掺杂SnO2薄膜的气敏特性","authors":"J. Aguilar-Leyva, A. Maldonado, M. Olvera","doi":"10.1109/ICEEE.2006.251940","DOIUrl":null,"url":null,"abstract":"We present results about the preparation and characterization of ruthenium doped-tin oxide (SnO2:Ru) thin films in a controlled atmosphere containing gas propane (C3H8) at different operation temperatures. The SnO2:Ru thin films were deposited by the spray pyrolysis technique onto soda-lime glass substrates. The effect of the addition of [Ru/Zn]=1 at. % to the SnO2 films, the operation and deposition temperatures, the propane concentration, and the annealing-time (vacuum at 400degC, time=1 or 2 h) on the films sensitivity has been studied. Two-hour sintered SnO2:Ru (1%) thin films, with a thickness on the order of 70 nm, measured at 300degC in a propane atmosphere of 500 ppm gave rise to the highest sensitivity registered in this work, ~8","PeriodicalId":125310,"journal":{"name":"2006 3rd International Conference on Electrical and Electronics Engineering","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Gas-sensing characteristics of ruthenium-doped SnO2 thin films in a propane atmosphere\",\"authors\":\"J. Aguilar-Leyva, A. Maldonado, M. Olvera\",\"doi\":\"10.1109/ICEEE.2006.251940\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present results about the preparation and characterization of ruthenium doped-tin oxide (SnO2:Ru) thin films in a controlled atmosphere containing gas propane (C3H8) at different operation temperatures. The SnO2:Ru thin films were deposited by the spray pyrolysis technique onto soda-lime glass substrates. The effect of the addition of [Ru/Zn]=1 at. % to the SnO2 films, the operation and deposition temperatures, the propane concentration, and the annealing-time (vacuum at 400degC, time=1 or 2 h) on the films sensitivity has been studied. Two-hour sintered SnO2:Ru (1%) thin films, with a thickness on the order of 70 nm, measured at 300degC in a propane atmosphere of 500 ppm gave rise to the highest sensitivity registered in this work, ~8\",\"PeriodicalId\":125310,\"journal\":{\"name\":\"2006 3rd International Conference on Electrical and Electronics Engineering\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-12-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 3rd International Conference on Electrical and Electronics Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICEEE.2006.251940\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 3rd International Conference on Electrical and Electronics Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICEEE.2006.251940","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Gas-sensing characteristics of ruthenium-doped SnO2 thin films in a propane atmosphere
We present results about the preparation and characterization of ruthenium doped-tin oxide (SnO2:Ru) thin films in a controlled atmosphere containing gas propane (C3H8) at different operation temperatures. The SnO2:Ru thin films were deposited by the spray pyrolysis technique onto soda-lime glass substrates. The effect of the addition of [Ru/Zn]=1 at. % to the SnO2 films, the operation and deposition temperatures, the propane concentration, and the annealing-time (vacuum at 400degC, time=1 or 2 h) on the films sensitivity has been studied. Two-hour sintered SnO2:Ru (1%) thin films, with a thickness on the order of 70 nm, measured at 300degC in a propane atmosphere of 500 ppm gave rise to the highest sensitivity registered in this work, ~8
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