溶胶-凝胶衍生Pb((Mg/sub 1/3/Nb/sub 2/3/)/sub 1-x/Ti/sub x/)O/sub 3/和Pb((Zn/sub 1/3/Nb/sub 2/3/)/sub 1-x/Ti/sub x/)O/sub 3/薄层的制备及性能

[Proceedings] 1990 IEEE 7th International Symposium on Applications of Ferroelectrics Pub Date : 1990-06-06 DOI:10.1109/ISAF.1990.200238

L. F. Francis, D. Payne

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引用次数: 1

摘要

合成了Pb((Mg/sub 1/3/Nb/sub 2/3/)/sub 1-x/Ti/sub x/)O/sub 3/ (PMNT)和Pb((Zn/sub 1/3/Nb) Ti/sub x/)O/sub 3/ (PZNT)体系的烷氧化物基溶液，并将其用于在镀铂硅上集成薄层电介质。采用多层自旋铸造法，对各层进行快速热处理。根据加工条件，每种组合物的薄层可以形成非铁电性焦绿石相或铁电性钙钛矿相。含有大量PMN或PZN的组合物需要更高的加工温度才能形成钙钛矿。报道了组成和热处理条件对结晶相发育、结构和介电性能的影响

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Preparation and properties of sol-gel derived Pb((Mg/sub 1/3/Nb/sub 2/3/)/sub 1-x/Ti/sub x/)O/sub 3/ and Pb((Zn/sub 1/3/Nb/sub 2/3/)/sub 1-x/Ti/sub x/)O/sub 3/ thin layers

Alkoxide-based solutions with compositions in the Pb((Mg/sub 1/3/Nb/sub 2/3/)/sub 1-x/Ti/sub x/)O/sub 3/ (PMNT) and Pb((Zn/sub 1/3/Nb) Ti/sub x/)O/sub 3/ (PZNT) systems were synthesized and used for the integration of thin layer dielectrics on platinized Si. A multilayering spin-casting method was used with rapid thermal processing of individual layers. Thin layers of each composition could be formed into a nonferroelectric pyrochlore phase or a ferroelectric perovskite phase depending upon processing conditions. Compositions containing greater amounts of PMN or PZN required higher processing temperatures for perovskite formation. The effects of composition and thermal processing conditions on the development and structure of crystalline phases, and dielectric properties are reported.<>

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[Proceedings] 1990 IEEE 7th International Symposium on Applications of Ferroelectrics

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