节能活动的设施设备和生产工具方法

2018 International Symposium on Semiconductor Manufacturing (ISSM) Pub Date : 2018-12-01 DOI:10.1109/issm.2018.8651159

Shunsuke Kuroki, M. Izuchi

{"title":"节能活动的设施设备和生产工具方法","authors":"Shunsuke Kuroki, M. Izuchi","doi":"10.1109/issm.2018.8651159","DOIUrl":null,"url":null,"abstract":"In order to reduce large energy consumption in semiconductor factories, we have renewed inefficient facility equipment and production tools to higher efficient equipment with introducing advanced control. These renewals result in approximately 6% reduction of energy consumption in 2018/1H against 2014/1H. The typical examples of energy saving activities are reported in this paper.","PeriodicalId":262428,"journal":{"name":"2018 International Symposium on Semiconductor Manufacturing (ISSM)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Approaches to Facility Equipment and Production Tools for Energy Saving Activities\",\"authors\":\"Shunsuke Kuroki, M. Izuchi\",\"doi\":\"10.1109/issm.2018.8651159\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In order to reduce large energy consumption in semiconductor factories, we have renewed inefficient facility equipment and production tools to higher efficient equipment with introducing advanced control. These renewals result in approximately 6% reduction of energy consumption in 2018/1H against 2014/1H. The typical examples of energy saving activities are reported in this paper.\",\"PeriodicalId\":262428,\"journal\":{\"name\":\"2018 International Symposium on Semiconductor Manufacturing (ISSM)\",\"volume\":\"46 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 International Symposium on Semiconductor Manufacturing (ISSM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/issm.2018.8651159\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 International Symposium on Semiconductor Manufacturing (ISSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/issm.2018.8651159","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

为了减少半导体工厂的大量能源消耗，我们将低效的设施设备和生产工具更新为更高效的设备，并引入先进的控制。与2014年同期相比，这些更新导致2018/上半年的能源消耗减少了约6%。本文报道了节能活动的典型实例。

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Approaches to Facility Equipment and Production Tools for Energy Saving Activities

In order to reduce large energy consumption in semiconductor factories, we have renewed inefficient facility equipment and production tools to higher efficient equipment with introducing advanced control. These renewals result in approximately 6% reduction of energy consumption in 2018/1H against 2014/1H. The typical examples of energy saving activities are reported in this paper.

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2018 International Symposium on Semiconductor Manufacturing (ISSM)

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