集成光电子学的物理和材料科学方面

O. Ermakov
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摘要

物理,材料科学和技术方面(充分的材料和衬底的选择,不同的物理效应和现代模拟方法的局限性)进行了讨论。对现代微电子学与光电子学发展趋势的分析表明,微电子学与光电子学之间的刚性界限正在逐渐模糊。广泛的材料范围以前只用于光电子(A3 B5 -, A2 B6 -, A4 B4 -化合物,他们出售的合金,金刚石,有机材料等),现在LSI设计师也感兴趣。虽然现在光电子中使用了各种不同的衬底类型(有机和无机,单晶和非晶,刚性和柔性),但光学透明和电绝缘衬底更适合集成光电子。其中一种衬底,即蓝宝石,现在具有重要的实际意义,因为蓝宝石上的硅(SOS)结构用于大规模集成电路的实现,而蓝宝石结构上的氮化镓及其合金(GNS)用于超亮led、ld和光电探测器的制造。特别关注有机结构的光学性质,作为集成光电子学和微电子学非常有前途的介质。讨论了不同的物理效应(能带结构、量子效应、无序效应、应变效应、载流子热效应)以及现代模拟方法的局限性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Physical and material science aspects of integrated optoelectronics
Physical, material science and technological aspects (adequate material and substrate choice, different physical effects and limitations of modern simulation methods) are discussed. Analysis of modern microelectronics and optoelectronics development trends shows that rigid boundaries between microoelectronics and optoelectronics are smearing. Wide materials range previously used only in optoelectronics ( A3 B5 - , A2 B6 -, A4 B4 - compounds, their sold alloys, diamond, organic material etc.) are now of interest for LSI designers also. Although wide range of different substrates types (organic and inorganic, single crystalline and amorphous, rigid and flexible) are now used in optoelectronics optically transparent and electrically insulating substrates are preferable for integrated optoelectronics. One type of such substrates namely sapphire is of essential practical interest now because silicon on sapphire (SOS) structures are used for LSI implementation and gallium nitride and its alloys on sapphire stwctures (GNS) are used for super bright LEDs, LDs and photodetectors fabrication. Special attention is paid to optical properties of organic structures as very promising media both for integrated optoelectronics and microelectronics. Different physical effects (band structure, quantum, disorder, strain, carrier heating effects) as well as limitations of modern simulation methods are discussed.
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