{"title":"使用大气纯氧等离子体对高级封装进行解封,实现真正的根本原因故障分析","authors":"Lea Heusinger-Jonda, Jiaqi Tang, K. Beenakker","doi":"10.31399/asm.edfa.2021-1.p004","DOIUrl":null,"url":null,"abstract":"\n Several failure analysis case studies have been conducted over the past few years, illustrating the importance of preserving root-cause evidence by means of artifact-free decapsulation. The findings from three of those studies are presented in this article. In one case, the root cause of failure is chlorine contamination. In another, it is a combination of corrosion and metal migration. The third case involves an EOS failure, the evidence of which was hidden under a layer of carbonized mold compound. In addition to case studies, the article also includes images that compare the results of different decapsulation methods.","PeriodicalId":431761,"journal":{"name":"EDFA Technical Articles","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2021-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Enabling True Root Cause Failure Analysis Using an Atmospheric Oxygen-Only Plasma for Decapsulation of Advanced Packages\",\"authors\":\"Lea Heusinger-Jonda, Jiaqi Tang, K. Beenakker\",\"doi\":\"10.31399/asm.edfa.2021-1.p004\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n Several failure analysis case studies have been conducted over the past few years, illustrating the importance of preserving root-cause evidence by means of artifact-free decapsulation. The findings from three of those studies are presented in this article. In one case, the root cause of failure is chlorine contamination. In another, it is a combination of corrosion and metal migration. The third case involves an EOS failure, the evidence of which was hidden under a layer of carbonized mold compound. In addition to case studies, the article also includes images that compare the results of different decapsulation methods.\",\"PeriodicalId\":431761,\"journal\":{\"name\":\"EDFA Technical Articles\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-02-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EDFA Technical Articles\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.31399/asm.edfa.2021-1.p004\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EDFA Technical Articles","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.edfa.2021-1.p004","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Enabling True Root Cause Failure Analysis Using an Atmospheric Oxygen-Only Plasma for Decapsulation of Advanced Packages
Several failure analysis case studies have been conducted over the past few years, illustrating the importance of preserving root-cause evidence by means of artifact-free decapsulation. The findings from three of those studies are presented in this article. In one case, the root cause of failure is chlorine contamination. In another, it is a combination of corrosion and metal migration. The third case involves an EOS failure, the evidence of which was hidden under a layer of carbonized mold compound. In addition to case studies, the article also includes images that compare the results of different decapsulation methods.