具有扇形换能器和数值模拟的锯形滤波器内表面声波的振幅和相位测量

IEEE Ultrasonics Symposium, 2005. Pub Date : 2005-09-18 DOI:10.1109/ULTSYM.2005.1603163

T. Chiba

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引用次数: 8

摘要

一种新的激光外差干涉测量方法应用于128Y-X LiNbO3衬底上具有扇形换能器的SAW滤波器内表面声波的相位测量。结果表明，扇形换能器内的驻波向扇形换能器的开口端移动，从而产生若干衍射光束。此外，还对声表面波滤波器的波传播和电特性进行了简单的数值模拟

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Amplitude and phase measurement of surface acoustic waves within a saw filter having fan-shaped transducers and numerical simulations

.� A new method of laser heterodyne interferometry is applied to the phase measurement of surface acoustic waves within a SAW filter having fan-shaped transducers on a 128Y-X LiNbO3 substrate. As a result, it is clarified that the standing waves inside the fan-shaped transducer move towards the open end of the fan, resulting in several diffraction beams. Furthermore, a simple numerical simulation concerning the wave propagation and electrical characteristics of a SAW filter

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IEEE Ultrasonics Symposium, 2005.

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