{"title":"多晶硅微动力齿轮系统的研制与改进","authors":"M. Avram, O. Neagoe, M. Simion","doi":"10.1109/SMICND.1996.557310","DOIUrl":null,"url":null,"abstract":"The purpose of this research was to design and fabricate a microdynamic system of three polysilicon gear wheels, using a three masks process for silicon microfabrication. The fabrication sequence of the micromechanical system is following the process described by Fan(1988) for micromachining detachable moving parts on silicon substrates. The basis for fabricating of movable parts is the use of sacrificial layers that act as spacers and they also keep the parts attached to the wafer during fabrication.","PeriodicalId":266178,"journal":{"name":"1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings","volume":"322 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1996-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Fabrication and improvement of polysilicon microdynamic gear wheels system\",\"authors\":\"M. Avram, O. Neagoe, M. Simion\",\"doi\":\"10.1109/SMICND.1996.557310\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The purpose of this research was to design and fabricate a microdynamic system of three polysilicon gear wheels, using a three masks process for silicon microfabrication. The fabrication sequence of the micromechanical system is following the process described by Fan(1988) for micromachining detachable moving parts on silicon substrates. The basis for fabricating of movable parts is the use of sacrificial layers that act as spacers and they also keep the parts attached to the wafer during fabrication.\",\"PeriodicalId\":266178,\"journal\":{\"name\":\"1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings\",\"volume\":\"322 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1996-10-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.1996.557310\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.1996.557310","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication and improvement of polysilicon microdynamic gear wheels system
The purpose of this research was to design and fabricate a microdynamic system of three polysilicon gear wheels, using a three masks process for silicon microfabrication. The fabrication sequence of the micromechanical system is following the process described by Fan(1988) for micromachining detachable moving parts on silicon substrates. The basis for fabricating of movable parts is the use of sacrificial layers that act as spacers and they also keep the parts attached to the wafer during fabrication.
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