VLSI失效分析中意外高阻抗电路的敏感性研究

Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Pub Date : 2014-09-18 DOI:10.1109/IPFA.2014.6898132

Gaojie Wen

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引用次数: 0

摘要

微探针分析在失效分析中起着重要的作用，它可以直接揭示失效信号，有助于隔离最终失效器件。但当遇到意外的高阻抗电路时，由于高阻抗部位对探针针和强光敏感，无法测量到真实的信号。本文通过一个实际案例和实验来说明高阻抗电路的敏感性，以及如何有效地找出高阻抗电路不稳定故障的根本原因。

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Study on sensitive character of unexpected high impedance circuit in VLSI failure analysis

Microprobe analysis plays an important role in failure analysis as it could reveal the failed signal directly and help to isolate the final failed device. But when met unexpected high impedance circuit, the real signal couldn't be measured as high impedance site was sensitive to probe needle and strong light. One real Case and experiment was studied in this paper to show how high impedance circuit was sensitive and how to find the root cause of this unstable failure efficiently.

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Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

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