Runhao Han, Peizhen Hong, Jingwen Hou, Zhang Bao, W. Xiong, Shuai Yang, Jianfeng Gao, Fei Liu, Z. Huo
{"title":"顶端电极拉伸应力对Hf0.5Zr0.5O2薄膜铁电性的影响","authors":"Runhao Han, Peizhen Hong, Jingwen Hou, Zhang Bao, W. Xiong, Shuai Yang, Jianfeng Gao, Fei Liu, Z. Huo","doi":"10.1109/EDTM55494.2023.10103065","DOIUrl":null,"url":null,"abstract":"In this report, we have investigated the effect of in-plane tensile stress on ferroelectricity of in Hf<inf>0.5</inf>Zr<inf>0.5</inf>O<inf>2</inf> films, by changing the thickness of TiN top electrode. As demonstrated by residual stress analysis, excessive tensile stress would promote phase transition from the tetragonal phase to the monoclinic phase, and thus degrade the ferroelectric properties in Hf<inf>0.5</inf>Zr<inf>0.5</inf>O<inf>2</inf> films. Our results suggest that there may be an optimal range of tensile stress to improve the ferroelectricity in HZO films.","PeriodicalId":418413,"journal":{"name":"2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)","volume":"109 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The Top Electrode Tensile Stress Effect on Ferroelectricity of Hf0.5Zr0.5O2 Thin Films\",\"authors\":\"Runhao Han, Peizhen Hong, Jingwen Hou, Zhang Bao, W. Xiong, Shuai Yang, Jianfeng Gao, Fei Liu, Z. Huo\",\"doi\":\"10.1109/EDTM55494.2023.10103065\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this report, we have investigated the effect of in-plane tensile stress on ferroelectricity of in Hf<inf>0.5</inf>Zr<inf>0.5</inf>O<inf>2</inf> films, by changing the thickness of TiN top electrode. As demonstrated by residual stress analysis, excessive tensile stress would promote phase transition from the tetragonal phase to the monoclinic phase, and thus degrade the ferroelectric properties in Hf<inf>0.5</inf>Zr<inf>0.5</inf>O<inf>2</inf> films. Our results suggest that there may be an optimal range of tensile stress to improve the ferroelectricity in HZO films.\",\"PeriodicalId\":418413,\"journal\":{\"name\":\"2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)\",\"volume\":\"109 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-03-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EDTM55494.2023.10103065\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDTM55494.2023.10103065","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The Top Electrode Tensile Stress Effect on Ferroelectricity of Hf0.5Zr0.5O2 Thin Films
In this report, we have investigated the effect of in-plane tensile stress on ferroelectricity of in Hf0.5Zr0.5O2 films, by changing the thickness of TiN top electrode. As demonstrated by residual stress analysis, excessive tensile stress would promote phase transition from the tetragonal phase to the monoclinic phase, and thus degrade the ferroelectric properties in Hf0.5Zr0.5O2 films. Our results suggest that there may be an optimal range of tensile stress to improve the ferroelectricity in HZO films.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
