可用于可见光和x射线焦平面阵列的CCD成像仪

IEEE International Solid-State Circuits Conference, 1989 ISSCC. Digest of Technical Papers Pub Date : 1989-02-15 DOI:10.1109/ISSCC.1989.48196

B. Burke, R. Mountain, D. Harrison, J. Reinold, C. Doherty, G. Ricker, M. Bautz, J. Doty

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引用次数: 112

摘要

在可见光波段的监视应用和x射线天文任务(如先进x射线天体物理设施和ASTRO-D卫星)中，需要用于紧挨着ccd(电荷耦合器件)的大型多芯片阵列。研制了一种420*420像素的帧传输CCD成像仪，该成像仪与其他成像仪三面相邻，可构成2*N芯片阵列。采用三相、三聚、埋道工艺，模具尺寸为12mm * 20mm。该阵列在低电荷水平下提供低噪声读出电路和高电荷转移效率，这是上述两种应用的关键要求。该装置也被证明适合作为在光谱模式下工作的软x射线成像仪

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An abuttable CCD imager for visible and X-ray focal plane arrays

Large multichip arrays for close-abutted CCDs (charged-coupled devices) are needed for surveillance applications in the visible band and for X-ray astronomy missions such as the Advanced X-ray Astrophysics Facility and the ASTRO-D satellite. A 420*420 pixel frame-transfer CCD imager which is designed to be abutted to other imagers on three sides so that arrays of 2*N chips can be constructed has been developed. A three-phase, triple-poly, buried-channel process is used, and the die size is 12 mm*20 mm. The arrays provide low-noise readout circuitry and high charge-transfer efficiency at low charge levels, critical requirements for both of the above applications. The device has also been shown to be suitable as a soft X-ray imager operating in a spectroscopic mode.<>

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来源期刊

IEEE International Solid-State Circuits Conference, 1989 ISSCC. Digest of Technical Papers

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