用于微加工的等离子炬装置

Proceedings of the Sixteenth National Radio Science Conference. NRSC'99 (IEEE Cat. No.99EX249) Pub Date : 1999-02-23 DOI:10.1109/NRSC.1999.760948

O. Mostafa

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引用次数: 0

摘要

描述了一种适合离子蚀刻和减薄应用的等离子炬装置的构造。该装置由一根不锈钢阳极棒组成，其周围有一个同轴浮动圆柱体。圆筒的表面有一个孔，用于机械限制排出物。阴极靶相对于该孔径放置，用于微加工，离子密度为160 mA/cm/sup /。N/sub /， Ar和He气体分别在1.92,2.3和1.56 KV的放电电压下，在2.6/spl倍/10/sup -4/ torr的压力下进行测试。

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Plasma torch device for micro-machining applications

The construction of a plasma torch device, which is suitable for ion etching and thinning applications has been described. The device consists of a stainless steel anode rod with a coaxial floating cylinder around it. The cylinder has an aperture on its surface for mechanical confinement of the discharge. The cathode target is placed opposing this aperture for micro machining with ion densities of the order of 160 mA/cm/sup 2/. N/sub 2/, Ar and He gases are tested using discharge voltages equal to 1.92, 2.3 and 1.56 KV respectively and at a pressure of 2.6/spl times/10/sup -4/ torr.

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Proceedings of the Sixteenth National Radio Science Conference. NRSC'99 (IEEE Cat. No.99EX249)

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