{"title":"基于共振扭桨的新型微机械粘度和密度传感器","authors":"Hao Li, Junbo Wang, Xiang Li, Deyong Chen","doi":"10.1109/ICSENS.2011.6127062","DOIUrl":null,"url":null,"abstract":"A micromachined resonant torsional paddle is presented to sense the viscosity and density of the liquid. The paddle is designed to work with torsional vibrating mode to improve the sensitivity. To simplify the fabrication, low-stressed SiNx with 5 um in thickness is used as the paddle. A positive-feedback circuitry is used to compensate the energy loss by the big damp in liquid, so that the SNR and the Q-factor of the paddle can be improved obviously. Characteristics experiments show that the Q-factor of the paddle in alcohol is enhanced from 2.65 to 24.55, and the torsional resonant frequency and the Q-factor of the paddle decrease with the density and the viscosity of the mixture solution respectively.","PeriodicalId":201386,"journal":{"name":"2011 IEEE SENSORS Proceedings","volume":"41 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"A novel micromachined viscosity and density sensor based on resonant torsional paddle\",\"authors\":\"Hao Li, Junbo Wang, Xiang Li, Deyong Chen\",\"doi\":\"10.1109/ICSENS.2011.6127062\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A micromachined resonant torsional paddle is presented to sense the viscosity and density of the liquid. The paddle is designed to work with torsional vibrating mode to improve the sensitivity. To simplify the fabrication, low-stressed SiNx with 5 um in thickness is used as the paddle. A positive-feedback circuitry is used to compensate the energy loss by the big damp in liquid, so that the SNR and the Q-factor of the paddle can be improved obviously. Characteristics experiments show that the Q-factor of the paddle in alcohol is enhanced from 2.65 to 24.55, and the torsional resonant frequency and the Q-factor of the paddle decrease with the density and the viscosity of the mixture solution respectively.\",\"PeriodicalId\":201386,\"journal\":{\"name\":\"2011 IEEE SENSORS Proceedings\",\"volume\":\"41 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 IEEE SENSORS Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2011.6127062\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 IEEE SENSORS Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2011.6127062","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A novel micromachined viscosity and density sensor based on resonant torsional paddle
A micromachined resonant torsional paddle is presented to sense the viscosity and density of the liquid. The paddle is designed to work with torsional vibrating mode to improve the sensitivity. To simplify the fabrication, low-stressed SiNx with 5 um in thickness is used as the paddle. A positive-feedback circuitry is used to compensate the energy loss by the big damp in liquid, so that the SNR and the Q-factor of the paddle can be improved obviously. Characteristics experiments show that the Q-factor of the paddle in alcohol is enhanced from 2.65 to 24.55, and the torsional resonant frequency and the Q-factor of the paddle decrease with the density and the viscosity of the mixture solution respectively.
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