粒状锌氧化法制备ZnO薄膜的光学性质

L. S. Chuah, Z. Hassan, S. S. Tneh
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摘要

采用热蒸发技术在Si(111)衬底上沉积锌薄膜。在无催化剂的情况下,将颗粒状锌膜在空气中900℃热氧化1小时,获得了价格低廉、操作简单的ZnO薄膜。ZnO薄膜具有六方纤锌矿结构。采用扫描电镜(SEM)和光致发光(PL)研究了ZnO薄膜样品的结构和光学特性。PL测量表明ZnO样品的近带边峰发生了蓝移。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optical Properties of ZnO Thin Films Prepared by Oxidation of Granulated Zn
The thermal evaporation technique was used to deposit the zinc (Zn) films on Si(111) substrates. ZnO thin films were obtained in an inexpensive and simple way by thermally oxidizing granulated Zn films at 900 °C in air for 1 hour without any catalyst. ZnO thin films have a hexagonal wurtzite structure. The structural and optical characteristics of ZnO thin films samples were investigated by scanning electron microscopy (SEM) and photoluminescence (PL). PL measurements revealed that the near band edge peak of ZnO samples was blue shifted.
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