用于玻璃芯片的碳纳米管凸点的可靠性

Xiaogang Fan, Xiaolei Li, W. Mu, D. Jiang, Shirong Huang, Yifeng Fu, Yan Zhang, Johan Liu
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引用次数: 1

摘要

碳纳米管(CNTs)由于其非凡的热、电和机械性能而成为电子互连的理想候选材料。在本研究中,利用纸张介导的控制方法将致密的碳纳米管凸起作为玻璃芯片(COG)应用的互连,然后将带有图图化碳纳米管凸起的硅芯片翻转并使用各向异性导电胶(ACA)在127.4 Mpa的键合压力下,170°C,粘合8秒。利用四点探针法测量每个凸点的接触电阻来评估COG的电学性能。分别测试了三种不同的结构轨迹,标记为轨迹A、轨迹B和轨迹C。还进行了热循环(-40至85°C, 800个循环)和湿热试验(85°C/85% RH, 1000小时),以评估CNT-COG结构的可靠性。在这些试验中记录了样品的平均接触电阻,在热循环和湿热试验后均未观察到明显的电气故障。实验结果表明,碳纳米管凸点具有良好的可靠性,在碳纳米管凸点中具有广阔的应用前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability of carbon nanotube bumps for chip on glass application
Carbon nanotubes (CNTs) are an ideal candidate material for electronic interconnects due to their extraordinary thermal, electrical and mechanical properties. In this study, densified CNT bumps utilizing the paper-mediated controlled method were applied as the interconnection for chip on glass (COG) applications, and the silicon chip with patterned CNT bumps was then flipped and bonded onto a glass substrate using anisotropic conductive adhesive (ACA) at a bonding pressure of 127.4 Mpa, 170°C for 8 seconds. The electrical properties of the COG were evaluated with the contact resistance of each bump measured using the four-point probe method. Three different structure traces, marked as Trace A, Trace B, and Trace C, were tested, respectively. Thermal cycling (-40 to 85°C, 800 cycles) and damp heat tests (85°C/85% RH, 1000 hours) were also conducted to evaluate the reliability of the CNT-COG structure. The average contact resistance of the samples was recorded during these tests, in which there was no obvious electrical failure observed after both the thermal cycling and damp heat tests. The results of these tests indicated that the COG has good reliability and the CNT bumps have promising potential applications in COG.
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