了解和控制晶圆片级芯片级封装的晶圆表面污染- Wiljelm Carl K. Olalia

Kristine B. Bongat
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引用次数: 0

摘要

在晶圆级芯片规模封装等半导体制造工艺中,良率是关键性能指标之一。良率也是质量、生产率和OEE的指标。如果产量低于限制或截止值,则表示质量不佳,因为该工艺正在拒绝受电气或视觉机械不同缺陷影响的晶圆片或骰子。ON在产品质量方面的主要客户期望要求之一是“零缺陷”。每一个质量差的代价都是等量的,用骰子数或ppm来计算。在生产效率方面,低产量的产品在转移到下一道工序或出货之前被保留在工序中。工程师分析问题所需的额外时间导致了更长的周期时间或排队。安森美在服务方面的主要客户期望要求是90-100%准时交货。最后,对于OEE来说,低成品率肯定会直接影响设备的整体效率,因为计算OEE时的一个参数是产品的好零件,以及总体规划中的理想周期时间和工时。综上所述,提高产量也将改善质量、生产率和周期时间。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Understanding and controlling wafer surface contamination at wafer level chip scale package — Wiljelm Carl K. Olalia
In a semiconductor manufacturing processes such as Wafer Level Chip Scale Package, yield is one of the Key Performance Indicator. Yield is also an indicator for Quality, Productivity and OEE. If the yield is below the limits or cut-off, it said to be that there is a sign of poor quality since the process is rejecting Wafer or Dice affected by different defects either by Electrical or by Visual Mechanical. One of the ON's Key Customer Expectation Requirements in terms of Product Quality is “Zero Defects”. There is an equivalent cost for each poor quality computed by number of dice or ppm. In terms of Productivity, Low Yield product is being hold at the process before moving the lot to next process or shipping out. The additional time required to Engineer on analyzing the problem resulted to longer cycle time or queuing. ON's Key Customer Expectation Requirements in terms of Service is 90–100% On Time Delivery. Lastly, for the OEE, definitely low yield will directly affect the overall equipment efficiency since one of the parameter when computing the OEE is the Good Parts from the product on top of the Ideal Cycle Time and Earned Hours from the Master Plan. To conclude, improving the yield will also improve the Quality, Productivity and Cycle Time.
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