单轴拉伸应变对非晶IGZO tft及柔性金属箔上电路电性能的影响

Shahrukh A. Khan, P. Kuo, A. Jamshidi-Roudbari, M. Hatalis
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引用次数: 16

摘要

价格低廉、重量轻的柔性显示器和传感器电子产品将比传统的刚性基板电子产品更坚固、更便携。迄今为止,大面积柔性系统是由a-Si:H或有机材料实现的,这些材料的移动性较低,限制了它们在需要大电流驱动的驱动电子设备中的应用。这就是基于氧化物半导体(非晶铟镓氧化锌,特别是IGZO)的薄膜晶体管(tft)提供了一个有吸引力的替代硅基tft的地方。因此,人们需要研究这些设备的机械弯曲和电气性能的相互依赖性,因为它们在柔性大面积电子产品中得到应用。本研究系统地研究了拉伸应变对柔性不锈钢基板上制备的IGZO tft和环形振荡器的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of uniaxial tensile strain on electrical performance of amorphous IGZO TFTs and circuits on flexible Metal foils
Inexpensive and light-weight flexible displays and sensor electronics would be more rugged and portable than the more conventional rigid substrate-based electronics. Till date, large area flexible systems are enabled by a-Si:H or organics which suffer from low mobilities that limit their use in driver electronics that require higher current drive. This is where oxide-semiconductor (amorphous Indium Gallium Zinc Oxide, IGZO in particular) based thin-film transistors (TFTs) provide an attractive alternative to silicon-based TFTs. Therefore, one needs to study the interdependence of mechanical flexing and electrical performance of these devices as they find applications in flexible large area based electronics. This study systematically investigates the influence of tensile strain on IGZO TFTs and ring oscillators fabricated on flexible stainless steel substrates.
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