纳米级聚合物电解质:纳米线晶体管的制造和应用

D. Carrad, A. Burke, S. Svensson, R. Lyttleton, H. Joyce, H. Tan, C. Jagadish, K. Storm, L. Samuelson, H. Linke, A. Micolich
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引用次数: 0

摘要

提出了一种利用电子束光刻技术在纳米尺度上对聚环氧乙烷/LiClO4聚合物电解质进行制模的方法。我们使用图案聚合物电解质作为高电容栅极电介质,用于InAs纳米线晶体管的“包栅”几何结构。在同一器件上实现了多个独立可控的栅极,在室温下表现出与传统金属/氧化物封装栅极相当的稳定性和亚阈值特性。室温下的强调谐与Li+/ClO4-输运对T <的“冻结”相结合;220k允许为量子输运测量设置和保持广泛的电荷环境。简单的制造和优异的栅极特性拓宽了聚合物电解质门控在纳米线和其他纳米器件研究中的应用范围。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Nanoscale polymer electrolytes: Fabrication and applications using nanowire transistors
We present a method to pattern the poly(ethylene oxide)/LiClO4 polymer electrolyte on the nm-scale by electron beam lithography. We use the patterned polymer electrolyte as a high capacitance gate dielectric for InAs nanowire transistors in a `wrap-gate' geometry. Patterning enabled multiple independently controllable gates on the same device, which exhibit stability and subthreshold characteristics comparable to conventional metal/oxide wrap-gates at room temperature. The strong tuning at room temperature combined with the `freeze-out' of Li+/ClO4- transport for T <; 220 K allows a wide range of charge environments to be set and held for quantum transport measurements. The simplicity of fabrication and excellent gate characteristics broadens the scope for polymer electrolyte gating in studies of nanowires and other nanoscale devices.
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