在开发设施中植入掩蔽集成工作调用的结果

International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM Pub Date : 1994-06-21 DOI:10.1109/ISSM.1994.729418

R. Griffin, R. Guo, M. Slama

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引用次数: 1

摘要

讨论了设备布局对晶圆厂性能的影响。传统的晶圆厂布局被工业工程师称为作业车间。作业车间系统的长处是优良的工艺灵活性。车间布局还会导致周期长、质量差以及工人之间沟通不畅。基于工作单元的晶圆厂解决了其中的一些弱点。本文介绍了在开发晶圆厂中植入掩蔽工作单元的初步结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Results Of An Implant Masking Integrated Workcall In A Development Facility

Effects of equipment layout on wafer fab performance are discussed. The traditional wafer fab layout is known to industrial engineers as a job shop. The strength of the job shop system is excellent process flexibility. Job shop layouts also cause long cycle times, lesser quality, and poor communication between workers. A workcell based wafer fab addresses some of those weaknesses. This paper presents initial results of the implant masking workcell in a development fab.

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International Symposium on Semiconductor Manufacturing, Extended Abstracts of ISSM

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