钙钛矿材料的基本薄膜加工

[Proceedings] 1990 IEEE 7th International Symposium on Applications of Ferroelectrics Pub Date : 1990-06-06 DOI:10.1109/ISAF.1990.200240

H. Adachi, M. Kitabatake, H. Higashino, K. Setsune, K. Wasa

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引用次数: 0

摘要

研究了铁电性钙钛矿氧化物的基本薄膜工艺。采用射频磁控溅射法制备了铅基钙钛矿铁电体的非晶、多晶和外延薄膜，并对其性能进行了讨论。利用具有优异铁电性能的外延PLZT薄膜，研究了其在光电子器件中的应用，并利用高速PLZT光开关构建了光传输系统。讨论了铁电薄膜的发展趋势。

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Basic thin film processing for perovskite materials

Basic thin-film processing for ferroelectric perovskite oxides was investigated. Amorphous, polycrystal, and epitaxial thin films of Pb-based perovskite ferroelectrics were prepared by RF-magnetron sputtering and their properties are discussed. By utilizing the epitaxial PLZT films with excellent ferroelectric properties, several applications to optical electronic devices were examined, and an optical transmission system was constructed using high-speed PLZT optical switches. Trends in ferroelectric thin films are discussed.<>

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[Proceedings] 1990 IEEE 7th International Symposium on Applications of Ferroelectrics

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