{"title":"单晶LaB6阴极光学图像与发射图像的相关性","authors":"V. Katsap, Chising Lai","doi":"10.1109/IVESC.2012.6264179","DOIUrl":null,"url":null,"abstract":"LaB6 cathode is the emitter of choice in electron beam lithography tools. In commercial LaB6 cathodes, the (100) crystalline plane is used as the emissive surface. Typical size of emitter is ~70 μm DIA. Quality control is usually done by observing (100) surface with a powerful microscope. Emission images of the same cathodes often reveal irregularities practically invisible or barely visible neither in optical microscope nor in SEM. We have obtained emission images of the LaB6 cathodes and compared them to optical and SEM images.","PeriodicalId":249267,"journal":{"name":"IVESC 2012","volume":"70 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Correlation between single crystal LaB6 cathode optical and emission images\",\"authors\":\"V. Katsap, Chising Lai\",\"doi\":\"10.1109/IVESC.2012.6264179\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"LaB6 cathode is the emitter of choice in electron beam lithography tools. In commercial LaB6 cathodes, the (100) crystalline plane is used as the emissive surface. Typical size of emitter is ~70 μm DIA. Quality control is usually done by observing (100) surface with a powerful microscope. Emission images of the same cathodes often reveal irregularities practically invisible or barely visible neither in optical microscope nor in SEM. We have obtained emission images of the LaB6 cathodes and compared them to optical and SEM images.\",\"PeriodicalId\":249267,\"journal\":{\"name\":\"IVESC 2012\",\"volume\":\"70 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IVESC 2012\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IVESC.2012.6264179\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IVESC 2012","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVESC.2012.6264179","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Correlation between single crystal LaB6 cathode optical and emission images
LaB6 cathode is the emitter of choice in electron beam lithography tools. In commercial LaB6 cathodes, the (100) crystalline plane is used as the emissive surface. Typical size of emitter is ~70 μm DIA. Quality control is usually done by observing (100) surface with a powerful microscope. Emission images of the same cathodes often reveal irregularities practically invisible or barely visible neither in optical microscope nor in SEM. We have obtained emission images of the LaB6 cathodes and compared them to optical and SEM images.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
