一个0.72 nW, 1个样品/s全集成pH传感器,65.8 LSB/pH灵敏度

Yihan Zhang, F. Cardoso, K. Shepard
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引用次数: 2

摘要

本文提出了一个0.85 mm2的完全集成的pH传感器IC,利用离子敏感场效应晶体管(ISFET)和参考场效应晶体管(REFET)对,其中原生铸造钝化层用作离子敏感层。pH传感器具有10位分辨率和65.8 LSB/pH灵敏度,同时在1个样品/s下仅消耗0.72 nW,将考虑功率、采样频率和灵敏度的总体性能指标(FoM)提高了> 4000x。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A 0.72 nW, 1 Sample/s Fully Integrated pH Sensor with 65.8 LSB/pH Sensitivity
This paper presents a 0.85 mm2 fully integrated pH sensor IC utilizing an ion sensitive field effect transistor (ISFET) and reference field effect transistor (REFET) pair in which the native foundry passivation layer is used as an ion sensitive layer. The pH sensor has 10 bit resolution with 65.8 LSB/pH sensitivity, while consuming only 0.72 nW at 1 sample/s, improving an overall figure of merit (FoM) that accounts for power, sampling frequency, and sensitivity by > 4000×.
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