圆柱形栅极-全能MOSFET体电位研究

M. Kessi, A. Benfdila, A. Lakhelef, L. Belhimer, M. Djouder
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引用次数: 2

摘要

本文研究了圆柱栅极(CGAA) MOSFET,并对其体电位进行了模拟和研究。研究了CGAA MOSFET的中心电势和表面电势模型,并对两种电势行为进行了比较。在柱坐标系下,通过求解泊松方程,利用有限元数值方法得到了通道掺杂浓度和带图。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation on Body Potential in Cylindrical Gate-All-Around MOSFET
Cylindrical gate all around (CGAA) MOSFET has been studied and the body potential has been simulated and studied. The center and surface potentials models are studied and a comparison is made between the two potential behaviours for a CGAA MOSFET. Moreover, the channel doping concentration and the band diagrams are obtained using the finite element numerical method by solving poisson's equation in the cylindrical coordinate system.
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