多晶CVD金刚石——一种新型微波电子介质材料

13th International Crimean Conference Microwave and Telecommunication Technology, 2003. CriMiCo 2003. Pub Date : 1900-01-01 DOI:10.1109/CRMICO.2003.158928

V. Ralchenko, V. Konov, V. Parshin, B. Garin, R. Heidinger

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引用次数: 2

摘要

介绍了化学气相沉积(CVD)技术制备的多晶金刚石片的性能，说明了其在微波电子学应用中的重要性。如今，CVD金刚石已成为一种工程材料，其独特的热学和电物理参数使其在新一代微波器件中非常有前途。

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Polycrystalline CVD diamond-a new dielectric material for microwave electronics

Properties of polycrystalline diamond wafers produced by chemical vapor deposition (CVD) are described which show their importance for applications in microwave electronics. Today CVD diamonds become an engineering material whose unique thermal and electrophysical parameters make it very promising for a new generation of microwave devices.

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来源期刊

13th International Crimean Conference Microwave and Telecommunication Technology, 2003. CriMiCo 2003.

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