基于两层SOI定时电路盖格模式雪崩光电二极管三维集成的激光雷达成像仪

2006 IEEE International Solid State Circuits Conference - Digest of Technical Papers Pub Date : 2006-09-18 DOI:10.1109/ISSCC.2006.1696163

B. Aull, J. Burns, Chenson Chen, B. Felton, Helen Hanson, C. Keast, J. Knecht, A. Loomis, M. Renzi, A. Soares, V. Suntharalingam, K. Warner, Deanna Wolfson, D. Yost, D. Young

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引用次数: 64

摘要

利用盖格模式雪崩光电二极管(APD)测量单个光子的到达时间，采用50mum像素大小的64times64激光雷达(ladar)探测器阵列。采用三层结构，每层有有源器件，每个像素有227个晶体管、6个3D过孔和一个APD。像素中的9b伪随机计数器测量时间。初始图像显示2ns时间量化

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Laser Radar Imager Based on 3D Integration of Geiger-Mode Avalanche Photodiodes with Two SOI Timing Circuit Layers

A 64times64 laser-radar (ladar) detector array with 50mum pixel size measures the arrival times of single photons using Geiger-mode avalanche photodiodes (APD). A 3-tier structure with active devices on each tier is used with 227 transistors, six 3D vias and an APD in each pixel. A 9b pseudorandom counter in the pixel measures time. Initial imagery shows 2ns time quantization

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2006 IEEE International Solid State Circuits Conference - Digest of Technical Papers

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