锑化镓表面中性硫钝化的研究

Ning An, Guojun Liu, Zhipeng Wei, Rui Deng, X. Fang, Xian Gao, Y. Zou, Mei Li, Xiao-hui Ma
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引用次数: 2

摘要

本文报道了一种新的钝化方法,即用中性硫(NH4)2S修饰GaSb表面。利用x射线光电子能谱(XPS)和光致发光(PL)作图研究了中性钝化前后GaSb表面的光学和化学性质。中性(NH4)2S钝化后,光致发光(PL)强度提高20倍,氧化物含量降低,单质Sb含量较未处理样品减少。钝化效应是由于砷和锑硫化物的形成导致表面态的显著降低。与常规碱性(NH4)2S处理相比,表面钝化强度和均匀性均有所提高。我们的研究还表明,中性硫钝化处理的表面在空气中至少48小时更稳定。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study on neutral sulphur passivation of gallium antimonide surface
We here report a new passivation method, with neutral sulphur, (NH4)2S, to modify the GaSb surface. The optical and chemical properties of GaSb surface before and after neutral passivation are investigated using x-ray photoelectron spectroscopy (XPS) and photoluminescence (PL) mapping. Neutral (NH4)2S passivation led to 20 times enhancement in photoluminescence (PL) intensity, lower oxide content, and a less amount of elemental Sb than the untreated sample. The passivtion effect results from the significant reduction in surface states due to the formation of Ga and Sb sulfide species. Compared to the regular alkaline (NH4)2S treatment, surface passivation intensity and homogeneity are both improved. Our studies also indicate the neutral sulphur passivation treated surface is much more stable in air for at least 48h.
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