{"title":"基于MEMS工作平台的独立纳米线热功率测量","authors":"N. Duarte, S. Tadigadapa","doi":"10.1117/12.775801","DOIUrl":null,"url":null,"abstract":"Nanowires of a diameter less than 50nm have been predicted to exhibit a higher thermoelectric figure of merit in comparison to their bulk equivalent. In order to experimentally measure the thermoelectric power in nanowires it is necessary to design and fabricate a measurement platform that is ideally matched in thermal and physical size and capable of testing a large number of individual nanowires in a high throughput manner. In this paper we present the design, fabrication, and characterization of a MEMS thermoelectric workbench with a high density of testing locations. Characteristic measurements of the thermoelectric power of Au nanowires are presented as demonstration of the workbench functionality.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"101 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Thermopower measurement of freestanding nanowires using a MEMS workbench\",\"authors\":\"N. Duarte, S. Tadigadapa\",\"doi\":\"10.1117/12.775801\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Nanowires of a diameter less than 50nm have been predicted to exhibit a higher thermoelectric figure of merit in comparison to their bulk equivalent. In order to experimentally measure the thermoelectric power in nanowires it is necessary to design and fabricate a measurement platform that is ideally matched in thermal and physical size and capable of testing a large number of individual nanowires in a high throughput manner. In this paper we present the design, fabrication, and characterization of a MEMS thermoelectric workbench with a high density of testing locations. Characteristic measurements of the thermoelectric power of Au nanowires are presented as demonstration of the workbench functionality.\",\"PeriodicalId\":130723,\"journal\":{\"name\":\"SPIE MOEMS-MEMS\",\"volume\":\"101 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-02-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE MOEMS-MEMS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.775801\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE MOEMS-MEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.775801","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Thermopower measurement of freestanding nanowires using a MEMS workbench
Nanowires of a diameter less than 50nm have been predicted to exhibit a higher thermoelectric figure of merit in comparison to their bulk equivalent. In order to experimentally measure the thermoelectric power in nanowires it is necessary to design and fabricate a measurement platform that is ideally matched in thermal and physical size and capable of testing a large number of individual nanowires in a high throughput manner. In this paper we present the design, fabrication, and characterization of a MEMS thermoelectric workbench with a high density of testing locations. Characteristic measurements of the thermoelectric power of Au nanowires are presented as demonstration of the workbench functionality.
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