利用模板印刷热固性和热塑性塑料的聚合物倒装芯片组件的工艺和可靠性特性

R. H. Estes
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引用次数: 4

摘要

实现低成本、高可靠性的解决方案,以满足先进的包装要求,是将不同的技术学科成功整合到最终产品中的高潮。这些包括先进的IC设计,衬底设计和制造,以及用于生产倒装芯片凹凸互连和下填充方法的特殊配方材料和工艺。用于凹凸形成的热固性和热塑性浆料的先进模板印刷可能是制造具有高可靠性的无焊倒装芯片组件的最关键参数。本文主要讨论导电热固性和热塑性糊状物在晶圆和/或基板上产生凹凸图案时的模板印刷过程。研究了模板类型、粘贴特性和打印参数之间的关系,并将其与产生的凹凸率、均匀性和电阻测量相关联。讨论了热固性与热塑性浆料的长期可靠性,模板孔的均匀性和质量,以及在倒装芯片组装的晶圆上产生可重复的均匀凸起的能力。最后,对实现无焊高性能倒装芯片解决方案的最佳方法提出了建议。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Process and reliability characteristics of polymer flip chip assemblies utilizing stencil printed thermosets and thermoplastics
The implementation of low cost, highly reliable solutions for advanced packaging requirements is the culmination of successfully integrating different technology disciplines into the final product. These include advanced IC design, substrate design, and fabrication, as well as specially formulated materials and processes for production of the flip chip bump interconnect and underfill methodology. Advanced stencil printing of thermoset and thermoplastic pastes for bump formation is perhaps the most critical parameter in the fabrication of solderless flip chip assemblies with high reliability. This discussion in this paper focuses on the stencil print process when conductive thermoset and thermoplastic pastes are processed to produce the bump pattern on wafers and/or substrates. Investigation of the relationships between the stencil type, paste characteristics, and print parameters are made and correlated with resulting bump yield, uniformity and electrical resistance measurements. Long term reliability is discussed with respect to thermoset vs. thermoplastic pastes, uniformity and quality of stencil apertures, and the ability to produce repeatable, uniform bumps on wafers for flip chip assembly. Finally, suggestions are made as to the best methods for achieving high performance flip chip solutions without solder.
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