多场辅助热电器件自组装工艺研究

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI:10.1109/TRANSDUCERS.2013.6626892

Y. B. Lin, Y. Tzeng, M. Dai, C. K. Liu, L. Liao, H. Chien, Y. S. Chen, K. Wang

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引用次数: 4

摘要

研究了微型热电发电机(μTEG)组件的动态多力场平台。该平台由导向模板和对准模板组成。动态力场由重力和磁力提供。热管被一个防静电的ITO立方体井限制。在不使用任何多余的热管的情况下，组装过程可以在13分钟内达到100%的成品率。组装p型和n型TEG支腿，分别转移到上电极和下电极上。热压后封装6×6和10×10 Bi2+xTe3-x μTEG阵列进行测试。在优化的22.3欧姆外部负载下，TEG阵列在ΔT温度为65.9°C时产生1.29 mW的功率。

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Multi-force-field assisted self-assembly process of thermoelectric device

This study presents a dynamic multi-force field platform for micro thermoelectric generator (μTEG) assembly. The platform consists of a guide template and an alignment template. The dynamic force fields are provided by gravitational force and magnetic force. The thermolegs are confined by an anti-static ITO cubical well. Without using any redundant thermolegs, the assembly process can achieve 100% yield within 13 minutes. P-type and N-type TEG legs are assembled and transferred to the top and bottom electrodes, respectively. After hot pressing, a 6×6 and a 10×10 Bi2+xTe3-x μTEG array are packaged for testing. The TEG array generates a power of 1.29 mW for a ΔT of 65.9°C under optimized external load of 22.3 Ohm.

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来源期刊

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

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