纳米薄膜纳米压痕的方法特点

2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO) Pub Date : 2022-10-10 DOI:10.1109/ELNANO54667.2022.9927091

M. Melnichenko, Y. Zhuk, N. Puchko

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引用次数: 0

摘要

利用微纳改性剂“微纳模”研究了金、铟纳米薄膜的表面形貌和纳米压痕的方法特点。研究了纳米压痕后材料表面粗糙度对图像和印模尺寸的影响。研究发现，铟纳米膜在玻璃上的压痕需要不超过0.9 cN的压痕载荷才能正确确定压痕尺寸。结果表明，在玻璃基板上金纳米膜的纳米压痕过程中，贝尔科维奇压痕的形状不是三角形的。结果表明，纳米压痕后，金纳米颗粒发生位移，压痕消失。

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Methodological Specifics of Nanoindentation of Nanosized Films

The paper investigates the surface morphology and methodological features of nanoindentation of gold and indium nanosized films using the micro-nano modifier “Micro-nano mod”. The influence of material surface roughness on the image and impression size after nanoindentation is shown. It was found that nanoindentation of indium nanofilms on glass requires an indentation load not exceeding 0.9 cN to correctly determine the impression size. It is demonstrated that during nanoindentation of gold nanofilms on a glass substrate, the shape of the Berkovich indenter impression is not triangular. It is determined that after nanoindentation, the gold nanoparticles are displaced and the impression disappears.

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2022 IEEE 41st International Conference on Electronics and Nanotechnology (ELNANO)

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