128°YX-LiNbO3上Al光栅下SAW传播的色散关系

2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications Pub Date : 2008-12-01 DOI:10.1109/SPAWDA.2008.4775744

Fangqian Xu, B. Jin

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引用次数: 0

摘要

基于离散格林函数和有限元方法，研究了128degYX-LiNbO3衬底上周期性Al光栅下表面声波的传播特性。给出了不同厚度铝条声表面波和COM参数的色散关系，为相应声表面波滤波器的设计提供了理论支持。

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Dispersion relations of SAW propagating under Al grating on 128°YX-LiNbO3

Based on discrete Green function and finite element method, properties about surface acoustic waves propagating under periodic Al grating on 128degYX-LiNbO3 substrate were studied. The dispersion relations of SAW and COM parameters for Al strips of different thickness are given, which can theoretically support the design of relevant SAW filters.

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2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications

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