电气过应力对LSI器件可靠性的影响

A. Hart, Tsuo-Tong Teng, A. McKenna
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引用次数: 7

摘要

MOS LSI器件在高温下的可靠性预测会受到静电放电和电气过应力条件的影响。在输入保护结构中使用结二极管的MOS器件在125°C环境温度下比在25°C环境温度下更容易受到静电放电的影响。失效分析和建模表明,由于MOS技术中使用的掺杂水平,这种影响对MOS LSI器件比双极器件更为严重。这些影响将影响在高温下运行的电子系统的加速寿命测试、模拟测试以及在高温下进行的失效分析技术。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability Influences from Electrical Overstress on LSI Devices
Reliability prediction of MOS LSI devices by testing at elevated temperature can be influenced by electrostatic discharge and electrical overstress conditions during the test period. MOS devices that used junction diodes in the input protection structure were found to be more susceptible to failure from electrostatic discharge in 125°C ambient temperature than at 25°C. Failure analysis and modeling indicate that this effect is more severe for MOS LSI devices than for bipolar devices due to the doping levels used in the MOS technology. These effects will impact accelerated life testing, simulation testing of electronic systems to be operated at elevated temperatures and failure analysis techniques performed at elevated temperatures.
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