{"title":"基于ANSYS的压电微泵结构分析","authors":"Jiashan Xu, Tao Guo, Hong-ming Sun, Hang Guo","doi":"10.1109/SPAWDA.2008.4775812","DOIUrl":null,"url":null,"abstract":"The micro-pump is an important drive component in the micro fluidics system. The piezoelectric drive is mainly employed as the actuator in MEMS devices. In this paper, a MEMS-based micro-pump with the attached PZT ceramic plate for drive is proposed. With the ANSYS software, a finite element model for this piezoelectrically driven micro-pump is established, and the vibration and coupled-field analyses are carried out in a cycle of vibration/driving to obtain the displacement of driving PZT/Si film and the liquid flow distribution inside the pumping cavity. The results show this proposed micro-pump has very good performance in driving fluid and can be used in micro fluid systems.","PeriodicalId":190941,"journal":{"name":"2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications","volume":"115 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Analysis of a piezoelectric micro-pump by using ANSYS\",\"authors\":\"Jiashan Xu, Tao Guo, Hong-ming Sun, Hang Guo\",\"doi\":\"10.1109/SPAWDA.2008.4775812\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The micro-pump is an important drive component in the micro fluidics system. The piezoelectric drive is mainly employed as the actuator in MEMS devices. In this paper, a MEMS-based micro-pump with the attached PZT ceramic plate for drive is proposed. With the ANSYS software, a finite element model for this piezoelectrically driven micro-pump is established, and the vibration and coupled-field analyses are carried out in a cycle of vibration/driving to obtain the displacement of driving PZT/Si film and the liquid flow distribution inside the pumping cavity. The results show this proposed micro-pump has very good performance in driving fluid and can be used in micro fluid systems.\",\"PeriodicalId\":190941,\"journal\":{\"name\":\"2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications\",\"volume\":\"115 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SPAWDA.2008.4775812\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SPAWDA.2008.4775812","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Analysis of a piezoelectric micro-pump by using ANSYS
The micro-pump is an important drive component in the micro fluidics system. The piezoelectric drive is mainly employed as the actuator in MEMS devices. In this paper, a MEMS-based micro-pump with the attached PZT ceramic plate for drive is proposed. With the ANSYS software, a finite element model for this piezoelectrically driven micro-pump is established, and the vibration and coupled-field analyses are carried out in a cycle of vibration/driving to obtain the displacement of driving PZT/Si film and the liquid flow distribution inside the pumping cavity. The results show this proposed micro-pump has very good performance in driving fluid and can be used in micro fluid systems.