聚对二甲苯栅极电介质的并五苯OTFT

J. Jakabovic, J. Kovác, R. Srnánek, M. Sokolský, D. Haško
{"title":"聚对二甲苯栅极电介质的并五苯OTFT","authors":"J. Jakabovic, J. Kovác, R. Srnánek, M. Sokolský, D. Haško","doi":"10.1109/ASDAM.2008.4743302","DOIUrl":null,"url":null,"abstract":"Organic thin film transistors (OTFT) characteristics generally depend on organic semiconductor thin film growth conditions and the gate dielectric. Authors concerned with the basic properties of pentacene OTFT, where the gate dielectric consists of three different dielectric materials: SiO2 (HMDS treated), SiO2 covered with diacetylene SAM formed by the Langmuir-Blodgett method and SiO2 covered with thin parylene layer. The highest transistor drain current value was reached for 40 nm pentacene film prepared at 30degC on parylene dielectric layer which corresponds to charge mobility 0.15 cm2 V-1 s-1 for top contact OTFT structure. The analysis of molecular microstructure of the pentacene films confirmed the quality of pentacene film prepared on parylene dielectric layer using resonance micro-Raman spectroscopy.","PeriodicalId":306699,"journal":{"name":"2008 International Conference on Advanced Semiconductor Devices and Microsystems","volume":"438 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Pentacene OTFT with parylene gate dielectric\",\"authors\":\"J. Jakabovic, J. Kovác, R. Srnánek, M. Sokolský, D. Haško\",\"doi\":\"10.1109/ASDAM.2008.4743302\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Organic thin film transistors (OTFT) characteristics generally depend on organic semiconductor thin film growth conditions and the gate dielectric. Authors concerned with the basic properties of pentacene OTFT, where the gate dielectric consists of three different dielectric materials: SiO2 (HMDS treated), SiO2 covered with diacetylene SAM formed by the Langmuir-Blodgett method and SiO2 covered with thin parylene layer. The highest transistor drain current value was reached for 40 nm pentacene film prepared at 30degC on parylene dielectric layer which corresponds to charge mobility 0.15 cm2 V-1 s-1 for top contact OTFT structure. The analysis of molecular microstructure of the pentacene films confirmed the quality of pentacene film prepared on parylene dielectric layer using resonance micro-Raman spectroscopy.\",\"PeriodicalId\":306699,\"journal\":{\"name\":\"2008 International Conference on Advanced Semiconductor Devices and Microsystems\",\"volume\":\"438 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 International Conference on Advanced Semiconductor Devices and Microsystems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASDAM.2008.4743302\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 International Conference on Advanced Semiconductor Devices and Microsystems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASDAM.2008.4743302","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4

摘要

有机薄膜晶体管(OTFT)的特性一般取决于有机半导体薄膜的生长条件和栅介质。作者研究了并五苯OTFT的基本性质,其中栅极介电材料由三种不同的介电材料组成:SiO2 (HMDS处理),SiO2上覆盖有Langmuir-Blodgett法形成的二乙炔SAM, SiO2上覆盖有薄的对二甲苯层。在30℃条件下在聚对二甲苯介质层上制备40 nm的并五苯薄膜时,晶体管漏极电流值最高,对应于顶部接触OTFT结构的电荷迁移率为0.15 cm2 V-1 s-1。利用共振微拉曼光谱对聚对二甲苯介质层上制备的并五苯薄膜的分子微观结构进行了分析,证实了所制备的并五苯薄膜的质量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Pentacene OTFT with parylene gate dielectric
Organic thin film transistors (OTFT) characteristics generally depend on organic semiconductor thin film growth conditions and the gate dielectric. Authors concerned with the basic properties of pentacene OTFT, where the gate dielectric consists of three different dielectric materials: SiO2 (HMDS treated), SiO2 covered with diacetylene SAM formed by the Langmuir-Blodgett method and SiO2 covered with thin parylene layer. The highest transistor drain current value was reached for 40 nm pentacene film prepared at 30degC on parylene dielectric layer which corresponds to charge mobility 0.15 cm2 V-1 s-1 for top contact OTFT structure. The analysis of molecular microstructure of the pentacene films confirmed the quality of pentacene film prepared on parylene dielectric layer using resonance micro-Raman spectroscopy.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信