总电离剂量和高温对180nm DSOI工艺的协同效应

Xu Zhang, Fanyu Liu, Bo Li, Siyuan Chen, Yang Huang, Jiangjiang Li, J. Jiao, T. Ye, Jiajun Luo
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引用次数: 0

摘要

在tg态偏置条件下,研究了高温和总电离剂量效应对h栅DSOI的协同效应。通过对比辐照实验,将纯温度效应与纯辐照效应分离,确定了两者的协同效应。此外,还讨论了有无后门补偿的缓和TID响应。结果表明,在测试过程中,当$\boldsymbol{V}_{\text{SO12}}=0\ \mathbf{V}$时,协同效应使阈值电压退化减弱。这可以解释为,随着温度的升高,电子更有可能隧穿到氧化物中,并补偿被捕获的电荷。此外,使用$\boldsymbol{V}_{\text{SO}12}=-\boldsymbol{10}\ \mathrm{V}$,在室温下观察到共同的TID缓解,并且由于正电荷捕获引起的电场线终止于负偏压电极,仍然可以很大程度上补偿协同效应。这可能会启发我们在非常恶劣的环境中也可以实现DSOI的高TID耐受性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Synergetic Effects of Total Ionizing Dose and High Temperature on 180 nm DSOI Technology
The synergetic effects of high temperature and total ionizing dose effects of H-gate DSOI are investigated under the TG-state bias condition. The comparative irradiation experiments are subjected to identify the synergetic effects by separating pure-temperature and pure-irradiation effects. Furthermore, the mitigated TID responses with/without back-gate compensation are discussed. The results show that synergetic effects make threshold voltage degradation weaken for our devices with the $\boldsymbol{V}_{\text{SO12}}=0\ \mathbf{V}$ during testing. It can be explained that the electrons will be more likely to tunnel into the oxides and compensate the trapped charges with temperature rising. Besides, with the $\boldsymbol{V}_{\text{SO}12}=-\boldsymbol{10}\ \mathrm{V}$, the common TID mitigation was observed under room temperature and the synergetic effects can still be greatly compensated due to the electric field lines induced by positive trapped charges terminating into the negatively biased electrode. It may enlighten us the high TID tolerance of DSOI can be achieved in very harsh environments.
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