声波传感器用ZnO纳米棒的合成

2013 IEEE XXXIII International Scientific Conference Electronics and Nanotechnology (ELNANO) Pub Date : 2013-04-16 DOI:10.1109/ELNANO.2013.6552008

A. Orlov, V. Ulianova, Y. Yakimenko, O. Bogdan, G. Pashkevich

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引用次数: 10

摘要

我们报道了氧化锌纳米棒在60°C硝酸锌/六亚甲基四胺溶液中的电化学生长。在镀金铌酸锂衬底和铝箔上生长高密度垂直纳米棒。扫描电镜结果表明，制备出了直径为150 ~ 300 nm、长度约为3 μm的六边形ZnO纳米棒。将合成的ZnO纳米棒应用于声表面波器件的传感元件，将提高质量和精度，简化制造过程，并且由于规则形状结构的数学表示简单，将改进新型声波传感器的模拟技术。

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Synthesis of ZnO nanorods for acoustic wave sensor

We reported the electrochemical growth of zinc oxide nanorods in a zinc nitrate/hexamethylenetetramine solution at 60°C. High-density vertical nanorods were grown on Au-coated lithium niobate substrates and aluminum foil. Scanning electron microscopy results showed that hexagon-shaped ZnO nanorods with a diameter in the range of 150 nm to 300 nm and a length of about 3 μm were formed. Application of synthesized ZnO nanorods as sensing element of SAW devices will promote quality and accuracy enhancement, manufacturing simplification, and novel acoustic wave sensors simulation technique improvements due to the mathematical representation simplicity of the regular-shaped structures.

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2013 IEEE XXXIII International Scientific Conference Electronics and Nanotechnology (ELNANO)

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