Some aspects of a rf plasma reactor design

At construction of RF plasma generators there is a need for sources of RF power capable to work in polyharmonic mode and permitting to execute distributed input of energy to a reactor volume. It is offered to use a modified discrete distributed amplifier (DDA) as a power source for the extended RF capacitively coupled low-temperature plasma generator. The load, which one is a plasma reactor, directly enters in a load line (LL) being by its a design part. Thus, the load is distributed lengthways of LL, instead of is massed on the end, as in the original DDA circuit. Last constrains us to revise processes flowing past in LL completely and look on efficiency of DDA in a new fashion.