0.1 /spl mu/m GaAs伪晶HEMT MMIC放大器可靠性测试

D. Leung, Y. Chou, C. Wu, R. Kono, J. Scarpulla, R. Lai, M. Hoppe, D. Streit
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引用次数: 7

摘要

在栅极长度为0.1 /spl mu/m的GaAs伪晶HEMT mmic上完成了可靠性测试。用于可靠性测试的电路是ALH225C,一个2级Q波段平衡放大器。该MMIC是在功率和低噪声衬底轮廓上制造的。两种版本的电路都进行了测试。寿命试验是在加速直流偏置和温度条件下进行的,以便在合理的时间内达到失效。在255、270和285℃的环境温度下,大约有152个mmic被用于阶跃应力和寿命测试。尽管在此寿命测试中使用了侵略性偏差,但该工艺在125/spl℃下的估计寿命很高。高功率MBE剖面的MTF (125/spl°C)为6/spl次/10/sup 9/ h,活化能为1.7 eV;低噪声MBE剖面的MTF (125/spl°C)为7/spl次/10/sup 7/ h,活化能为1.3 eV。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability testing of 0.1 /spl mu/m GaAs pseudomorphic HEMT MMIC amplifiers
Reliability testing was completed on 0.1 /spl mu/m gate length GaAs pseudomorphic HEMT MMICs. The circuit used for reliability testing is the ALH225C, a 2-stage Q band balanced amplifier. This MMIC was fabricated on both power and low noise substrate profiles. Both versions of the circuit were tested. The lifetests were conducted with accelerated DC bias and temperature conditions in order to attain failure in a reasonable length of time. Approximately 152 MMICs were used for step stress and lifetesting at 255, 270 and 285/spl deg/C ambient temperature. Despite the aggressive bias used in this lifetest, the estimated lifetimes at 125/spl deg/C for this process are high. The parameters extracted from this study for the high power MBE profile are MTF (125/spl deg/C) of 6/spl times/10/sup 9/ hours, with activation energy of 1.7 eV, and for the low noise MBE profile are MTF (125/spl deg/C) of 7/spl times/10/sup 7/ hours, with activation energy of 1.3 eV.
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