集成衍射光栅的热机械探测器阵列

LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings Pub Date : 2007-11-12 DOI:10.1109/LEOS.2007.4382668

O. Ferhanoğlu, M. F. Toy, G. Unal, H. Kalyoncu

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引用次数: 0

摘要

采用MEMS双材料结构，设计并制作了一种低NETD的非制冷热探测器阵列。在像素膜上嵌入衍射光栅，用于检测亚纳米机械偏转。一阶反射光被聚焦在CCD相机上以监视整个阵列。结果表明，使用12位CCD相机可以实现< 50mK的NETD。

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Thermal-mechanical Detector Array with Integrated Diffraction Grating

An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve < 50mK NETD using a 12 bit CCD camera.

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LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings

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