Anjan Kumar, Abhinav Dikshit, Bill Clark, Jeff Yan
{"title":"一种基于锁相环的高q MEMS谐振器频率扫描锁定方案","authors":"Anjan Kumar, Abhinav Dikshit, Bill Clark, Jeff Yan","doi":"10.1109/VLSID.2015.17","DOIUrl":null,"url":null,"abstract":"Making a MEMS resonator to oscillate at its natural frequency is an essential function in vibratory gyroscopes and is done by using a PLL inside the feedback loop. In particular, because of high Q (quality factor) resonators, signal levels at start up can be very low, posing challenges to achieve PLL lock or lead to unacceptable lock times. This paper proposes a novel frequency scan technique to achieve start up and, hence, lock for the loop. The paper describes a comparator circuit to convert the input sinusoid to a clock with in-built band pass filter, dc and ac hysteresis. Also a scheme is proposed to avoid wrong phase at start up which could arise in a resonator loop using charge pump based PLL. All the above techniques are implemented in TSMC 0.18 micron process for the ADXRS290 gyroscope product and results show a reliable PLL lock with startup time <;5 ms for up to a Q of 2500.","PeriodicalId":123635,"journal":{"name":"2015 28th International Conference on VLSI Design","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"A Frequency Scan Scheme for PLL-Based Locking to High-Q MEMS Resonators\",\"authors\":\"Anjan Kumar, Abhinav Dikshit, Bill Clark, Jeff Yan\",\"doi\":\"10.1109/VLSID.2015.17\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Making a MEMS resonator to oscillate at its natural frequency is an essential function in vibratory gyroscopes and is done by using a PLL inside the feedback loop. In particular, because of high Q (quality factor) resonators, signal levels at start up can be very low, posing challenges to achieve PLL lock or lead to unacceptable lock times. This paper proposes a novel frequency scan technique to achieve start up and, hence, lock for the loop. The paper describes a comparator circuit to convert the input sinusoid to a clock with in-built band pass filter, dc and ac hysteresis. Also a scheme is proposed to avoid wrong phase at start up which could arise in a resonator loop using charge pump based PLL. All the above techniques are implemented in TSMC 0.18 micron process for the ADXRS290 gyroscope product and results show a reliable PLL lock with startup time <;5 ms for up to a Q of 2500.\",\"PeriodicalId\":123635,\"journal\":{\"name\":\"2015 28th International Conference on VLSI Design\",\"volume\":\"47 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 28th International Conference on VLSI Design\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/VLSID.2015.17\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 28th International Conference on VLSI Design","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSID.2015.17","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Frequency Scan Scheme for PLL-Based Locking to High-Q MEMS Resonators
Making a MEMS resonator to oscillate at its natural frequency is an essential function in vibratory gyroscopes and is done by using a PLL inside the feedback loop. In particular, because of high Q (quality factor) resonators, signal levels at start up can be very low, posing challenges to achieve PLL lock or lead to unacceptable lock times. This paper proposes a novel frequency scan technique to achieve start up and, hence, lock for the loop. The paper describes a comparator circuit to convert the input sinusoid to a clock with in-built band pass filter, dc and ac hysteresis. Also a scheme is proposed to avoid wrong phase at start up which could arise in a resonator loop using charge pump based PLL. All the above techniques are implemented in TSMC 0.18 micron process for the ADXRS290 gyroscope product and results show a reliable PLL lock with startup time <;5 ms for up to a Q of 2500.