电磁扫描微镜无模型自适应PID控制

2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2022-08-08 DOI:10.1109/3M-NANO56083.2022.9941521

Wanyan Sun, Qingyuan Tan, Yonghong Tan

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引用次数: 0

摘要

针对电磁扫描微镜的角度控制问题，提出了一种与模型无关的自适应PID控制方案。在该方案中，仅利用微镜的输入输出数据，设计了无模型自适应机构，在线调整PID参数，以适应因微镜存在滞回而导致的微镜特性变化。这使得微镜的偏转角度能够快速准确地跟踪参考轨迹。最后，仿真结果表明，该控制方法在控制微镜的偏转角度方面取得了比PID控制更好的控制性能。

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PID Control with Model-free Adaptive Mechanism for Electromagnetic Scanning Micromirrors

In this paper, a model-independent adaptive PID control scheme is proposed for the angle control of electromagnetic scanning micromirrors. In this scheme, only using the input and output data of the micromirror, a model-free adaptive mechanism is designed to adjust the PID parameters online to adapt to the change of the micromirror characteristics due to the hysteresis exists in the micromirror. It makes the deflection angle of the micromirror can track the reference trajectory fast and accurately. Finally, the simulation results show that the proposed control method has achieved better control performance than PID control in controlling the deflection angle of the micromirror.

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2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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