宽频响可动并联板射频MEMS开关

2015 IEEE Applied Electromagnetics Conference (AEMC) Pub Date : 2015-12-01 DOI:10.1109/AEMC.2015.7509162

Piyush M. Bhatasana, D. Pujara, S. Bera

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引用次数: 7

摘要

设计了一种具有两个并联悬索桥的新型射频MEMS开关，适用于宽频率范围。本文报道了如何通过改变容性执行器的面积来实现更宽的带宽。当平行板宽度从50 μm变化到150 μm时，在15-47.5 GHz范围内，上状态开关的插入损耗低于0.5 dB，回波损耗降至25 dB。在相同的频率范围内，下行状态开关产生的回波损耗低于0.5 dB，隔离度低至25 dB。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Movable parallel plate RF MEMS switch with wide frequency response

A novel RF MEMS switch with two parallel suspending bridges is designed for wide frequency range. This paper reports, how change in the area of capacitive actuators can be used to achieve wider bandwidth. Change in parallel plate width from 50 μm to 150 μm, up state switch yields an insertion loss lower than 0.5 dB and return loss down to 25 dB in the range of 15-47.5 GHz. Down state switch yields return loss lower than 0.5 dB and isolation down to 25 dB at the same frequency range.

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2015 IEEE Applied Electromagnetics Conference (AEMC)

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