单点金刚石车削光学材料微观表面特征的定量及后续化学抛光

Nelson Cardenas, Matthew Kyrish, Daniel Taylor, M. Fraelich, Oscar M. Lechuga, R. Claytor, N. Claytor
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引用次数: 2

摘要

电化学抛光通常用于阳极氧化工业,以在阳极氧化之前实现各种金属产品的镜面抛光。电化学抛光的作用是使基片的微观波峰和波谷平整,从而增加镜面和减少光散射。攻击速率取决于构成表面光洁度的微观结构的物理特性(高度、深度和宽度)。为了制备样品,通常需要在蚀刻之前进行机械抛光,如抛光或研磨。这种类型的机械抛光在不同的深度和宽度上产生随机的微观结构,因此电抛光参数是在一个特殊的基础上确定的。另外,单点金刚石车削提供了出色的重复性和高度特定的基材抛光参数控制。在抛光过程中,金刚石刀具会留下相应的刀具痕迹,这与金刚石刀具的几何形状和加工参数有关。机床参数,如刀具切削深度,速度和步距可以在现场改变,从而提供控制基材表面形貌特征的微观结构的空间频率。通过将单点金刚石车削与随后的电化学蚀刻相结合,可以对旋转对称和自由形状的镜面和模具进行超光滑抛光。此外,加工参数可以设置优化后抛光,以提高表面质量和减少加工时间。在这项工作中,我们提出了一项基于金刚石车削刀具标记空间频率的基材表面光洁度的研究,并进行了后续的电化学抛光。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Quantification of microscopic surface features of single point diamond turned optics with subsequent chemical polishing
Electro-Chemical Polishing is routinely used in the anodizing industry to achieve specular surface finishes of various metals products prior to anodizing. Electro-Chemical polishing functions by leveling the microscopic peaks and valleys of the substrate, thereby increasing specularity and reducing light scattering. The rate of attack is dependent of the physical characteristics (height, depth, and width) of the microscopic structures that constitute the surface finish. To prepare the sample, mechanical polishing such as buffing or grinding is typically required before etching. This type of mechanical polishing produces random microscopic structures at varying depths and widths, thus the electropolishing parameters are determined in an ad hoc basis. Alternatively, single point diamond turning offers excellent repeatability and highly specific control of substrate polishing parameters. While polishing, the diamond tool leaves behind an associated tool mark, which is related to the diamond tool geometry and machining parameters. Machine parameters such as tool cutting depth, speed and step over can be changed in situ, thus providing control of the spatial frequency of the microscopic structures characteristic of the surface topography of the substrate. By combining single point diamond turning with subsequent electro-chemical etching, ultra smooth polishing of both rotationally symmetric and free form mirrors and molds is possible. Additionally, machining parameters can be set to optimize post polishing for increased surface quality and reduced processing times. In this work, we present a study of substrate surface finish based on diamond turning tool mark spatial frequency with subsequent electro-chemical polishing.
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